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  • 三菱グループ
  • 関西熱化学グループ

Precision Cleaning

Precision Cleaning Services

  • Precision Cleaning of Semiconductor and LCD Manufacturing Equipment
    ・Spattering apparatus, Silica tubes, CVD apparatus, Ion plating systems,
    Ion implanters, Vacuum evaporation systems, Pipings, Etching systems,
    ・Vacuum Pump Disassembly and cleaning
  • Rotary pumps, Scroll pumps, Mechanical boosters, Scroll pumps,
    Turbo-molecular pumps, Diffusion pumps, Cryogenic pumps
    ・Cryogenic Pump Cold Panel Recycling
    ・Solvent Cleaning
    ・Removal and Coating of Titanium Hardened Surfaces (CVD, PVD)
Disposal of Industrial Wastes
Disposal of Industrial Wastes…By specialist waste management company under contract.